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This Test Method applies to all types of in-line components used in gas delivery systems for precise delivery of gaseous species used in semiconductor manufacturing
Values of the scan obtained using this method are reported in Ra and Rq
SEMI M31 — Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 300 mm Wafers
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met
2 dichloroethylene used in the semiconductor industry
C00605 - SEMI C6.5 - パイプラインガスとして授受されるグレード10/0.2窒素（N2）およびアルゴン（Ar）に対するパーティクル仕様 StdPbc-0212 This Test Method applies toNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Gases Global Technical Committee2011912global Audits and Reviews Subcommittee201111www. semiviews. org www. semi. org1990200211 NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by